REFURBISH
Furnaces
Our furnace product offering consists of vertical furnaces manufactured by Kokusai (Vertron series), TEL Alpha 8S(E), and the BTI(Apogee). We also refurbish horizontal furnaces from MRL, BTI, SVG and others. We offer both equipment and services on 150mm and 200mm tools for diffusion, CVD and anneal processes. Our engineers hold some of the highest certifications provided by the OEM. Please contact us for a comprehensive list of platform, process and chamber configurations.
| GENERAL INFORMATION MATRIX | ||
|---|---|---|
| APPLICATIONS | Diffusion, CVD, Anneal | |
| MANUFACTURER/ MODELS |
 VERTICALTEL: α8S(E), α800 series, α303(i) Kokusai: Vertron Series(3A–3J) BTI: Apogee |
 HORIZONTALMRL BTI SVG Others |
| WAFER SIZE | Up to 200mm | |
| PARTS | Only to support our internal projects | |