REFURBISH
Photolithography
Our photolithography refurbishment offering consists of Nikon steppers/scanners and TEL and SVG tracks. We offer both equipment and services for up to 200mm tools. With Nikon products, we cover g-line, i-line, ArF and KrF applications. We specialize in i-line steppers on i7-i14 bodies with 1755, 2005 and 2205mm exposure fields. Our TEL track products consist of Tel Act 8 for 200mm applications and Mark V-VIII for up to 200mm application. We also provide upgraded SVG legacy tracks for the 8600 and 8800 series.
| GENERAL INFORMATION MATRIX | ||
|---|---|---|
| APPLICATIONS/ MANUFACTURER |
 STEPPER/SCANER |
Nikon |
| APPLICATIONS | g-line (436nm), i-line (365nm), KrF (248nm), ArF (193nm) | |
| SPECIALTY | i-7 to i-14 (1755, 2005, 2255 exposure fields) | |
| APPLICATIONS |  TRACK |
|
| MANUFACTURER/ MODELS |
TEL Act 8, Mark V-VIII | |
| SVG 8600, 8800 series | ||
| WAFER SIZE | Up to 200mm | |
| PARTS | Only to support our internal projects | |