REFURBISH
LAM
Most of our Lam equipment business focuses on the legacy etch equipment for 150mm and 200mm applications. These include the Rainbow and Alliance / TCP tool sets. Additionally, we offer labor services for 2300 tools on both 200mm and 300mm wafer platforms. We typically only support parts for the tools we refurbish. Please contact us for a comprehensive list of platform, process and chamber configurations.
| GENERAL INFORMATION MATRIX | ||
|---|---|---|
| APPLICATION |  ETCH |
|
| PROCESS | 2300: Kiyo (conductor) Versys (metal) Exelan dielectric |
200mm–300mm (Service Only) |
| Alliance Platform: A4 and A6 |
200mm | |
| TCP Process Modules: 9400 poly 9600 metal |
200mm | |
| Rainbow: 44xx, 45xx, 46xx |
125mm, 150mm, 200mm | |
| PARTS | Only to support our internal projects | |